Short Coherence Transmitted Light Interfrometer
For the Thickness Measurement of Si Membranes

The TRIRCI is a measurement device for non contact thickness measurement of Si beams. It lends itself for the use in the laboratory, work shop and the quality assurance in a production line.

The measurement head offers unparalleled repeatability and has a robust and compact design. It is maintenance free and therefore suitable for an in-line process.

The thickness of Si membranes is determined within a few seconds and an automated procedure allows easy checking of whole wafers. The TRIRCI is capable to cover a wide range of thickness values, starting from 200 nm up to almost 1mm using a footprint of the probing beam of approximately 150mm.